Comparative Study of Electron Counting and Conventional Analogue Detection of Secondary Electrons in SEM

Y. Uchikawa(Bristol-Myers Squibb (Japan)), Pooja Sardeshmukh, S. Yamada(National Institute for Fusion Science), Tsutomu Ito(Nagoya University), Tetsuji Kodama, K. Gouhara(Nagoya University)
Journal of Electron Microscopy
August 1, 1992
Cited by 9


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