Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

A. A. Dolgov(University of Twente), F. Bijkerk(University of Twente), D. V. Lopaev(Lomonosov Moscow State University), V. V. Medvedev(University of Twente), Chris Lee(Topcon (Netherlands)), E. Zoethout(Dutch Institute for Fundamental Energy Research), O. F. Yakushev(Institute of Spectroscopy)
Applied Surface Science
June 23, 2015
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