Fabrication and wafer-level packaging of si electrostatic microgripper for micro assembly

Kunnyun Kim(Korea University), Joungho Park(Korea Institute of Energy Research), Kang Ryeol Lee(Korea Electronics Technology Institute), Ingyu Lee(Korea Aerospace University), Chanwoo Moon(Korea Electronics Technology Institute), Joon‐Shik Park(Korea University)
Unknown
August 24, 2005
Cited by 1


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