X-ray reflectivity study of SiO2 on Si

Steve M. Heald(Argonne National Laboratory), Gary W. Rubloff(University of Maryland, College Park), J.K.D.S. Jayanetti(Brookhaven National Laboratory), A. A. Bright(IBM Research - Thomas J. Watson Research Center)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

May 1, 1990

10.1116/1.576803

Cited by 25

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