Role of O(1D) in the oxidation of Si(100)

Tiffany C. Kaspar(Pacific Northwest National Laboratory), Y. Ono, Russell G. Tonkyn(Pacific Northwest National Laboratory), Wayne P. Hess(Pacific Northwest National Laboratory), Allan C. Tuan(Pacific Northwest National Laboratory), J.W. Rogers(Pacific Northwest National Laboratory)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
March 1, 2003
10.1116/1.1563254
Cited by 24

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