AlN texturing and piezoelectricity on flexible substrates for sensor applications

Emanuele Smecca(Institute for Microelectronics and Microsystems), Alessandra Alberti(Institute for Microelectronics and Microsystems), S. Mirabella(University of Catania), Vincenzo Vinciguerra(STMicroelectronics (Switzerland)), Luigi La Magna(STMicroelectronics (Italy)), Francesco Maita(Institute for Microelectronics and Microsystems), Luca Maiolo(Institute for Microelectronics and Microsystems), G. Fortunato(Institute for Microelectronics and Microsystems), Guglielmo G. Condorelli(University of Catania), Giovanna Pellegrino(Institute for Microelectronics and Microsystems)
Applied Physics Letters
June 8, 2015
Cited by 41


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