Leaderboards/Advancements in Photolithography Techniques

Advancements in Photolithography Techniques

Last updated July 7, 2026

Rising Stars

New and hot

Rising Stars Researchers

1
Ga‐Young Lim
Indiana University Bloomington
2
Jingyuan Deng
Southwest University
3
Shuanlong Niu
National University of Defense Technology
4
Mehrnaz Modaresialam
Solvay (Belgium)
5
Yuxuan Duan
Chongqing Normal University
6
Ziyang Yu
Chinese University of Hong Kong
7
Chenxu Zhu
Soochow University
8
Shengwen Hu
Technical Institute of Physics and Chemistry
9
Hojung Choi
Stanford University
10
Yuxiang Wei
University of Electronic Science and Technology of China

Rising Stars Papers

1
Electron beam lithography on nonplanar and irregular surfaces
Microsystems & Nanoengineering|2024
76 cit.
2
Multinuclear Tin-Based Macrocyclic Organometallic Resist for EUV Photolithography
ACS Materials Au|2024
42 cit.
3
Mucoadhesive and Self-Assembled Chitosan Oligosaccharide-Glycyrrhizin Nanoparticle for Oral Nanotherapeutic in Inflammatory Bowel Disease
ACS Nano|2025
15 cit.
4
Nano-imprint lithography of broad-band and wide-angle antireflective structures for high-power lasers
Optics Express|2024
10 cit.
5
A Functional 3D Biomimetic Osteon Accelerates Bone Regeneration
Advanced Functional Materials|2025
9 cit.
6
RuleLearner: OPC Rule Extraction From Inverse Lithography Technique Engine
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems|2024
3 cit.
7
Personalized Image Generation with Deep Generative Models: A Decade Survey
Computational Visual Media|2025
2 cit.
8
Pruning-Based Multi-Agent DRL for Efficient Twins Migration in Vehicular Embodied AI Networks
Unknown Journal|2025
2 cit.
9
Design of an AR-Based Visual Narrative System for Abandoned Mines Integrating Regional Culture
Sustainability|2025
2 cit.
10
KanIDS: An Intrusion Detection System for All Kernel Interactions Based on Kolmogorov-Arnold Network
Unknown Journal|2025
1 cit.

Emerging Leaders

Gaining momentum

Emerging Leaders Researchers

1
Sonia Castellanos
Institute of Catalysis and Petrochemistry
2
Deepak V. Kulkarni
Advanced Micro Devices (United States)
3
Seok Hyung Lee
SK Group (South Korea)
4
Yao-Lung L. Fang
Brookhaven National Laboratory
5
Nvidia Corporation
Unknown
6
Seokho Kang
Sungkyunkwan University
7
Pengzhong Chen
Dalian University of Technology
8
Dimitrios Kazazis
Paul Scherrer Institute
9
Fatih Hamzaoglu
Intel (United States)
10
Thorsten Last
ASML (Netherlands)

Emerging Leaders Papers

1
Quantum Long Short-Term Memory
ICASSP 2022 - 2022 IEEE International Conference on Acoustics, Speech and Signal Processing (ICASSP)|2022
219 cit.
2
Extreme ultraviolet lithography
Nature Reviews Methods Primers|2024
102 cit.
3
Uncertainty-aware prediction of chemical reaction yields with graph neural networks
Journal of Cheminformatics|2022
76 cit.
4
Extreme ultraviolet lithography reaches 5 nm resolution
Nanoscale|2024
53 cit.
5
Semi-automatic wafer map pattern classification with convolutional neural networks
Computers & Industrial Engineering|2022
41 cit.
6
Supervised contrastive learning for wafer map pattern classification
Engineering Applications of Artificial Intelligence|2023
31 cit.
7
Generative Modeling to Predict Multiple Suitable Conditions for Chemical Reactions
Journal of Chemical Information and Modeling|2022
30 cit.
8
Learning from single-defect wafer maps to classify mixed-defect wafer maps
Expert Systems with Applications|2023
28 cit.
9
Class-Adaptive Data Augmentation for Image Classification
IEEE Access|2023
25 cit.
10
Retention Time Prediction through Learning from a Small Training Data Set with a Pretrained Graph Neural Network
Analytical Chemistry|2023
23 cit.

Current Senior Leaders

Established & currently active

Current Senior Leaders Researchers

1
George M. Whitesides
Harvard University
2
David Z. Pan
The University of Texas at Austin
3
Lars Hultman
Linköping University
4
Christopher K. Ober
Cornell University
5
L. Jay Guo
University of Michigan
6
Yasin Ekinci
Paul Scherrer Institute
7
Chad A. Mirkin
Northwestern University
8
Henry I. Smith
LumArray (United States)
9
Shinji Okazaki
Association of Super-Advanced Electronics
10
Sung Kyu Lim
University of Southern California

Current Senior Leaders Papers

1
Self-Assembly at All Scales
Science|2002
7.4k cit.
2
A DNA-based method for rationally assembling nanoparticles into macroscopic materials
Nature|1996
6.7k cit.
3
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
Analytical Chemistry|1998
5.3k cit.
4
SOFT LITHOGRAPHY
Annual Review of Materials Science|1998
4.6k cit.
5
Selective Colorimetric Detection of Polynucleotides Based on the Distance-Dependent Optical Properties of Gold Nanoparticles
Science|1997
4.4k cit.
6
Chaotic Mixer for Microchannels
Science|2002
3.4k cit.
7
"Dip-Pen" Nanolithography
Science|1999
3k cit.
8
Nanoparticles with Raman Spectroscopic Fingerprints for DNA and RNA Detection
Science|2002
3k cit.
9
Patterned Paper as a Platform for Inexpensive, Low‐Volume, Portable Bioassays
Angewandte Chemie International Edition|2007
2.8k cit.
10
Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices
Analytical Chemistry|2003
2.6k cit.

Indexing Advancements in Photolithography Techniques Reagents

Citation data for reagents in this field is currently compiling.