Unlocking the power of industrial artificial intelligence towards Industry 5.0: Insights, pathways, and challengesJiewu Leng, Qiang Liu, Xiaofeng Zhu et al.|Journal of Manufacturing Systems|2024Cited by 184
Review—Progress in Electrochemical Etching of Third-Generation SemiconductorsYun Chen, Ching‐Ping Wong, Maoxiang Hou et al.|ECS Journal of Solid State Science and Technology|2023Cited by 28